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Design and strength evaluation of an anodically bonded pressurized cavity array for wafer-level MEMS packaging Go, Jeung Sang; Cho, Young-Ho, Inter. Mechanical Engineering Congress and Exposition (IMECE '98),, v.66, pp.357 - 360, 1998-11-15 |
Design, Fabrication and Static Test of a Resonant Microaccelerometer Kim, SY; Go, Jeung Sang; Cho, Young-Ho, ASME, pp.21 - 26, 1997-11-01 |
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