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Nanoporous Silicon Thin Film-Based Hydrogen Sensor Using Metal-Assisted Chemical Etching with Annealed Palladium Nanoparticles

Kim, Hyeonggyun; Yun, Jeonghoon; Gao, Min; Kim, Hyeok; Cho, Minkyu; Park, Inkyu, ACS APPLIED MATERIALS & INTERFACES, v.12, no.39, pp.43614 - 43623, 2020-09

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