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A Bulk-micromachined Silicon Micromirror for Tunable Optical Switch Applications Seo, Kyoung-Sun; Cho, Young-Ho; Youn, Sung-Kie, Proc. IEEE 5th Inter. Conf. on Emerging Technologies and Factory Automation (ETFA '96), pp.404 - 407, 1996 |
An Electrostatically-tunable Switching Micromirror using (110) Silicon Wafers Seo, Kyoung-Sun; Cho, Young-Ho; Youn, Sung-Kie, Tech. Dig. IEEE/LEOS 1996 Summer Topical Meetings: Optical MEMS and Their Applications, pp.41 - 42, 1996-08 |
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