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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

An Electrostatically-tunable Switching Micromirror using (110) Silicon Wafers

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Seo, Kyoung-Sun / Cho, Young-Horesearcher / Youn, Sung-Kieresearcher
Issue Date
1996-08
Language
ENG
Citation

Tech. Dig. IEEE/LEOS 1996 Summer Topical Meetings: Optical MEMS and Their Applications, pp.41 - 42

URI
http://hdl.handle.net/10203/123915
Appears in Collection
BiS-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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