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Influence on deformed shape of electrostatic deformable mirror by the geometry of electrode

Nam, Saekwang; Park, Suntak; Yun, Sungryul; Park, Bongje; Park, Seung Koo; Kyung, Ki-Uk, 2016 Conference on Lasers and Electro-Optics, CLEO 2016, Institute of Electrical and Electronics Engineers Inc., 2016-06

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