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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Influence on deformed shape of electrostatic deformable mirror by the geometry of electrode

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Nam, Saekwang / Park, Suntak / Yun, Sungryul / Park, Bongje / Park, Seung Koo / Kyung, Ki-Ukresearcher
In electrostatic deformable mirrors, the gap distance between the mirror membrane and the basement affects the mirror's deformation. We analyze how the mirror is affected by applying different sets of gap distance.
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2016-06
Language
English
Citation

2016 Conference on Lasers and Electro-Optics, CLEO 2016

DOI
10.1364/CLEO_AT.2016.JTh2A.7
URI
http://hdl.handle.net/10203/273068
Appears in Collection
ME-Conference Papers(학술회의논문)
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