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Manufacture and experiment of a compliant parallel XY nano-positioning stage for high dynamic performance

Jeong, Jae Heon; Kim, Myeong-Hyeon; Woo, Siwoong; Lee, Hak Jun; Park, Jae Hyun; Ahn, Dahoon; Kim, Hyoyoung; et al, 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, euspen, 2016-05

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