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Heating mode transition in the capacitive mode of inductively coupled plasma and the electron temperature change during the E-H transition Chung, C.W.; Kim, S.S.; Chang, Hong-Young, 2002 IEEE International Conference on plasma Science, pp.290 -, IEEE, 2002-05-26 |
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim, S.S.; Chung, C.W.; Chang, Hong-Young, The Joint International Plasma Symposium, v.435, no.40545, pp.72 - 77, Thin Solid Films, 2002-07-01 |
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