Heating mode transition in the capacitive mode of inductively coupled plasma and the electron temperature change during the E-H transition

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Publisher
IEEE
Issue Date
2002-05-26
Language
ENG
Citation

2002 IEEE International Conference on plasma Science, pp.290 -

ISSN
0730-9244
URI
http://hdl.handle.net/10203/127313
Appears in Collection
PH-Conference Papers(학술회의논문)
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