Heating mode transition in the capacitive mode of inductively coupled plasma and the electron temperature change during the E-H transition
- Publisher
- IEEE
- Issue Date
- 2002-05-26
- Language
- ENG
- Citation
2002 IEEE International Conference on plasma Science, pp.290 -
- ISSN
- 0730-9244
- Appears in Collection
- PH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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