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Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers

Bok, Cheol Kyu; Koh, Cha-Won; Baik, Ki Ho; Kim, Jin-Baek; Jung, Min Ho; Cheong, Jong-Ho, Advances in Resist Technology and Processing XIV, v.3049, pp.501 - 511, SPIE, 1997-01

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