Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers

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Publisher
SPIE
Issue Date
1997-01
Language
ENG
Citation

Advances in Resist Technology and Processing XIV, v.3049, pp.501 - 511

URI
http://hdl.handle.net/10203/120642
Appears in Collection
CH-Conference Papers(학술회의논문)
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