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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Conference Papers(학술회의논문)

Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers

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Bok, Cheol Kyu / Koh, Cha-Won / Baik, Ki Ho / Kim, Jin-Baek researcher / Jung, Min Ho / Cheong, Jong-Ho

Publisher: SPIE

Issue Date: 1997-01

Language: ENG

Citation: Advances in Resist Technology and Processing XIV, v.3049, pp.501 - 511

URI: http://hdl.handle.net/10203/120642

Appears in Collection: CH-Conference Papers(학술회의논문)

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