INFLUENCES OF INDIUM TIN OXIDE LAYER ON THE PROPERTIES OF RF MAGNETRON-SPUTTERED (BASR)TIO3 THIN-FILMS ON INDIUM TIN OXIDE-COATED GLASS SUBSTRATE

Cited 25 time in webofscience Cited 0 time in scopus
  • Hit : 324
  • Download : 0
Nearly stoichiometric ((Ba + Sr)/Ti = 1.08-1.09) and optically transparent (BaSr)TiO3 thin films were deposited on an indium tin oxide (ITO)-coated glass substrate by means of rf magnetron sputtering for their application to the insulating layer of an electroluminescent flat panel display. The influence of the ITO layer on the properties of (BaSr)TiO3 thin films deposited on the ITO-coated substrate was investigated. The ITO layer did not affect the crystallographic orientation of (BaSr)TiO3 thin film, but enhanced the grain growth. Another effect of the ITO layer on (BaSr)TiO3 thin films was the interdiffusion phenomenon, which was studied by means of secondary ion mass spectrometry (SIMS). As the substrate temperature increased, interdiffusion intensified at the interface not only between the grown film and ITO layer but also between the ITO layer and base glass substrate. The refractive index (nf) of (BaSr)TiO3 thin film deposited on a bare glass substrate was 2.138-2.286, as a function of substrate temperature. © 1993 The Japan Society of Applied Physics.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1993-06
Language
English
Article Type
Article
Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.32, no.6A, pp.2837 - 2841

ISSN
0021-4922
DOI
10.1143/JJAP.32.2837
URI
http://hdl.handle.net/10203/61646
Appears in Collection
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 25 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0