Browse "MS-Journal Papers(저널논문)" by Subject low-temperature plasma-enhanced atomic layer deposition
Showing results 1 to 1 of 1
| Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application Kim, Hyo Yeon; Jung, Eun Ae; Mun, Geumbi; Agbenyeke, Raphael E.; Park, Bo Keun; Park, Jin-Seong; Son, Seung Uk; et al, ACS APPLIED MATERIALS & INTERFACES, v.8, no.40, pp.26924 - 26931, 2016-10 |
Discover
Open Access
- 265 OA Article
Date issued
- 1,014 2020 - 2024
- 2,625 2010 - 2019
- 2,168 2000 - 2009
- 1,240 1990 - 1999
- 179 1980 - 1989