Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application

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Low-temperature growth of In2O3 films was demonstrated at 70-250 degrees C by plasma-enhanced atomic layer deposition (PEALD) using a newly synthesized liquid indium precursor, dimethyl(N-ethoxy-2,2-dimethylcarboxylicpropanamide)indium (Me2In(EDPA)), and O-2 plasma for application to high-mobility thin film transistors. Self-limiting In2O3 PEALD growth was observed with a saturated growth rate of approximately 0.053 nm/cycle in an ALD temperature window of 90-180 degrees C. As-deposited In2O3 films showed negligible residual impurity, film densities as high as 6.64-7.16 g/cm(3), smooth surface morphology with a root-mean-square (RMS) roughness of approximately 0.2 nm, and semiconducting level carrier concentrations of 10(17)-10(18) cm(-3). Ultrathin In2O3 channel-based thin film transistors (TFTs) were fabricated in a coplanar bottom gate structure, and their electrical performances were evaluated. Because of the excellent quality of In2O3 films, superior electronic switching performances were achieved with high field effect mobilities of 28-30 and 16-19 cm(2)/V.s in the linear and saturation regimes, respectively. Furthermore, the fabricated TFTs showed, excellent gate control characteristics in terms of subthreshold swing, hysteresis, and on/off current ratio. The low-temperature PEALD process for high-quality In2O3 films using the developed novel In precursor can be widely used in a variety of applications such as microelectronics, displays, energy devices, and sensors, especially at temperatures compatible with organic substrates
Publisher
AMER CHEMICAL SOC
Issue Date
2016-10
Language
English
Article Type
Article
Keywords

CYCLOPENTADIENYL INDIUM; IN2O3 FILMS; TRANSPARENT; SUBSTRATE; VAPOR

Citation

ACS APPLIED MATERIALS & INTERFACES, v.8, no.40, pp.26924 - 26931

ISSN
1944-8244
DOI
10.1021/acsami.6b07332
URI
http://hdl.handle.net/10203/214261
Appears in Collection
MS-Journal Papers(저널논문)
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