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Three-dimensional nanofabrication with elastomeric phase masks

Shir, Daniel J.; Jeon, Seokwoo; Liao, Hongwei; Highland, Matthew; Cahill, David G.; Su, Mehmet F.; El-Kady, Ihab F.; et al, JOURNAL OF PHYSICAL CHEMISTRY B, v.111, no.45, pp.12945 - 12958, 2007-11

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