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Conformal phase masks made of polyurethane acrylate with optimized elastic modulus for 3D nanopatterning

Park, Junyong; Tahk, Dongha; Ahn, Changui; Im, SungGap; Choi, Se-Jin; Suh, Khap-Yang; Jeon, Seokwoo, JOURNAL OF MATERIALS CHEMISTRY C, v.2, no.13, pp.2316 - 2322, 2014-01

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