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구리 흡착에 의한 비정질 실리콘 박막의 저온 결정화 거동

An, Byeong-Tae; Son, Dong-Gyun; Jo, Seong-U; Lee, Jae-Sin, 한국재료학회지, v.7, no.3, pp.188 - 195, 1997-12

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