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Showing results 1 to 6 of 6

1
Composition and electrical properties of metallic Ru thin films deposited using Ru(C6H6)(C6H8) precursor

Choi, J; Choi, Y; Hong, J; Tian, H; Roh, JS; Kim, Y; Chung, TM; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.41, pp.6852 - 6856, 2002-11

2
Interfacial layer properties of HfO2 films formed by plasma-enhanced atomic layer deposition on silicon

Park, PK; Roh, JS; Choi, BH; Kang, SW, ELECTROCHEMICAL AND SOLID STATE LETTERS, v.9, no.5, pp.F34 - F37, 2006-03

3
P and As implantation enhanced formation of metal-free oxide on WSi2

Lee, JG; Kim, JY; Lee, JeongYong; Roh, JS; Huh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.12A, pp.7140 - 7145, 1997-12

4
Platinum hillocks in Pt/Ti film stacks deposited on thermally oxidized Si substrate

Kweon, SY; Choi, Si-Kyung; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.10, pp.5850 - 5855, 2001-10

5
Stacked Pt/SrBi2Ta2-xNbxO9/Pt/IrOx/Ir capacitor on poly plug

Kweon, SY; Choi, Si-Kyung; Yang, WS; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.41, no.1, pp.66 - 69, 2002-01

6
Thermal stability and electrical properties of SrBi2Ta2-xNbxO9/IrOx capacitors with Pt top electrode

Kweon, SY; Choi, Si-Kyung; Yang, WS; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.9A, pp.5275 - 5280, 2001-09

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