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AN ULTRA-HIGH-SPEED ECL-BICMOS TECHNOLOGY WITH SILICON FILLET SELF-ALIGNED CONTACTS

LIU, TYM; CHIN, GM; Jeon, DukYoung; MORRIS, MD; ARCHER, VD; JOHNSON, RW; TARSIA, M; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.41, no.9, pp.1546 - 1555, 1994-09

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