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Influence of active layer thickness and annealing in zinc oxide TFT grown by atomic layer deposition

Ahn, Cheol Hyoun; Woo, Chang Ho; Hwang, SooYeon; Lee, JeongYong; Cho, Hyung Koun; Cho, Hyoung Jin; Yeom, Geun Young, SURFACE AND INTERFACE ANALYSIS, v.42, pp.955 - 958, 2010-06

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