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Dielectric properties of SrTiO3 thin films on SrRuO3 seed prepared by plasma-enhanced atomic layer deposition

Ahn J.-H.; Kim J.-Y.; Kim J.-H.; Roh J.-S.; Kang S.-W., Physics and Technology of High-k Gate Dielectrics 6 - 214th ECS Meeting, pp.335 - 339, 123, 2008-10-13

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