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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Dielectric properties of SrTiO3 thin films on SrRuO3 seed prepared by plasma-enhanced atomic layer deposition

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Ahn J.-H. / Kim J.-Y. / Kim J.-H. / Roh J.-S. / Kang S.-W.researcher
Publisher
123
Issue Date
2008-10-13
Language
English
Citation

Physics and Technology of High-k Gate Dielectrics 6 - 214th ECS Meeting, pp.335 - 339

ISSN
1938-5862
URI
http://hdl.handle.net/10203/158069
Appears in Collection
MS-Conference Papers(학술회의논문)
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