Browse "MS-Conference Papers(학술회의논문)" by Author Rha, Sa-Kyun
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| Atomic Layer Deposition of Silicon Nitride Thin Film Park, Chong-Ook; Lee, Joo-Hyeon; Kim, Hyuk; Lee, Yeon-Seong; Rha, Sa-Kyun; Lee, Won-Jun, AVS Topical Conference ALD 2002, pp.P-14 -, 2002 |
| Improved Copper Chemical Vapor Deposition Process by Applying Substrate Bias Park, Chong-Ook; Lee, Won-Jun; Rha, Sa-Kyun; Lee, Seung-Yun; Kim, Dong-Won; Chun, Soung-Soon, 1996 MRS Spring Symposium, v.427, pp.207 - 212, 1996-04-08 |
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