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Control and modeling of stress in multi-stacked polysilicon films considering oxidation effect

Lee, CS; Jang, WI; Choi, CA; Hong, YS; Lee, JH; No, Kwangsoo; Wee, DM, Micromachining and Microfabrication Process Technology IV, v.3511, pp.315 - 324, 1998-09-21

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