DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Control and modeling of stress in multi-stacked polysilicon films considering oxidation effect

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 356
  • Download : 0
Export
Lee, CS / Jang, WI / Choi, CA / Hong, YS / Lee, JH / No, Kwangsooresearcher / Wee, DM
Issue Date
1998-09-21
Language
ENG
Citation

Micromachining and Microfabrication Process Technology IV, v.3511, pp.315 - 324

URI
http://hdl.handle.net/10203/117544
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Full Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0