Control and modeling of stress in multi-stacked polysilicon films considering oxidation effect

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 248
  • Download : 0
Issue Date
1998-09-21
Language
ENG
Citation

Micromachining and Microfabrication Process Technology IV, v.3511, pp.315 - 324

URI
http://hdl.handle.net/10203/117544
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0