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Formation of TiSi2 thin films from chemical vapor deposition using TiI4 Rhee, Hwa Sung; Jang, Tae Woong; Baek, Jong Tae; Ahn, Byung Tae, Proceedings of the 1998 MRS Spring Symposium, pp.345 - 350, MRS, 1998-04-13 |
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