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ECRPECVD법으로 증착한 SiOF박막의 잔류응력 안정화에 관한 연구A study on the stabilization of residual stress in SiOF thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition 최시경; 김석필; 박영수; 정일섭, 한국요업학회, pp.192 -, 2000 |
Effect of N2O Plasma Treatment on the Water Absorption of SiOF Thin Films 최시경; 김석필; 박영수, 한국세라믹학회, pp.53 -, 2001 |
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