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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Scheduling Wafer Lots on Diffusion Machines in a Semiconductor Wafer Fabrication Facility Kim, Yeong-Dae; Joo, BJ; Choi, SY, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.23, pp.246 - 254, 2010-05 |
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