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| Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations Lee, Jun-Ho; Kim, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.4, pp.2167 - 2174, 2020-10 |
| Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08 |
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