Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers

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Most cluster tool scheduling studies assume identical access times between chambers or do not discuss the impact of access times. However, the optimal scheduling rule and the cycle time can depend on the access times or physical configuration of parallel chambers. Therefore, we examine cyclic scheduling problems for cluster tools that have nonidentical access times. We first develop Petri net models for tool behaviors and analyze the cycle time by identifying the workloads of the process steps. We prove that the conventional backward and swap sequencing strategies are still optimal for single-armed and dual-armed cluster tools, respectively, when a process step is the bottleneck and the tool repeats a minimal cyclic work cycle. We also present a closed-form formula for the cycle time and identify a coprime condition on the number of parallel chambers for which the cycle time is independent of the order of using parallel chambers. Finally, we develop a mixed integer programming model for cases in which the coprime requirement is not satisfied.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2012-08
Language
English
Article Type
Article; Proceedings Paper
Keywords

STEADY-STATE THROUGHPUT; PETRI NETS; ROBOTIC CELLS; SCHEDULABILITY; PERFORMANCE; CONSTRAINTS

Citation

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431

ISSN
0894-6507
DOI
10.1109/TSM.2012.2199329
URI
http://hdl.handle.net/10203/103927
Appears in Collection
IE-Journal Papers(저널논문)
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