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Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08 |
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots Kim, Hyun-Jung; Lee, Jun-Ho; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.1, pp.145 - 159, 2013-01 |
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