Browse "IE-Journal Papers(저널논문)" by Author Lee, Tae-Eog
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| Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09 |
| Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 |
| Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07 |
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