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Results 1-6 of 6 (Search time: 0.006 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools Park, Kyungsu; Morrison, James R, 8th IEEE International Conference on Automation Science and Engineering , IEEE CASE, 2012-08 | |
| Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment Park, Kyungsu; Morrison, James R, 6th Annual IEEE Conference on Automation Science and Engineering , pp.45 - 50, IEEE CASE, 2010-08 | |
| Control of wafer release in multi cluster tools Park, Kyungsu; Morrison, James R, 8th IEEE International Conference on Control and Automation, pp.1481 - 1487, ICCA, 2010-06 | |
| Wafer admission control for clustered photolithography tools Park, Kyungsu; Morrison, James R, Advanced Semiconductor Manufacturing Conference , pp.220 - 225, ASMC, 2010-07 | |
| Cluster tool design comparisons via simulation Park, Kyungsu; Morrison, James R, 7th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM), Winter Simulation Conference, pp.1877 - 1887, MASM, 2011-12 | |
| Performance models for dual-arm cluster tools Park, Kyungsu; Ahn, Younghun; Morrison, James R, 2011 World Congress on Intelligent Control and Automation, WCICA, 2011-06 |