Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools
- Publisher
- IEEE CASE
- Issue Date
- 2012-08
- Language
- ENG
- Citation
8th IEEE International Conference on Automation Science and Engineering
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.