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Results 11-12 of 12 (Search time: 0.003 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
11
Regular flow line models for semiconductor cluster tools: A case of lot dependent process times

Morrison, James R, 2009 IEEE International Conference on Automation Science and Engineering, CASE 2009, pp.561 - 566, 123, 2009-08-22

12
Flow lines with regular service times: Evolution of delay, state dependent failures and semiconductor wafer fabrication

Morrison, James R, 4th IEEE Conference on Automation Science and Engineering, CASE 2008, pp.247 - 252, IEEE, 2008-08-23

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