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Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a K-Cyclic Schedule Roh, Dong-Hyun; Lee, Tae-Eog, 2018 IEEE 14th International Conference on Automation Science and Engineering (CASE), pp.1562 - 1567, IEEE, 2018-08 |
The open architecture scheduling system for a single-armed cluster tool with PM cleaning operations Roh, Dong-Hyun; Lee, Tae-Eog, 16th International Conference on Modeling and Applied Simulation, MAS 2017, pp.60 - 67, CAL-TEK S.r.l., 2017-09-18 |
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