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Integration of lot dispatching and AMHS control in a 300mm wafer FAB

Sun, D.-S.; Park, N.-S.; Lee, Y.-J.; Jang, Y.-C.; Ahn, C.-S.; Lee, Tae-Eog, 2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence, pp.270 - 274, IEEE/SEMI, 2005-04-11

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