DSpace at KOASAS: Integration of lot dispatching and AMHS control in a 300mm wafer FAB

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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Integration of lot dispatching and AMHS control in a 300mm wafer FAB

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Sun, D.-S. / Park, N.-S. / Lee, Y.-J. / Jang, Y.-C. / Ahn, C.-S. / Lee, Tae-Eog researcher

Publisher: IEEE/SEMI

Issue Date: 2005-04-11

Language: ENG

Citation: 2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence, pp.270 - 274

ISSN: 1078-8743

URI: http://hdl.handle.net/10203/7391

Appears in Collection: IE-Conference Papers(학술회의논문)

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