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Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus

Park, Jong-Min; Choi, Jong-Kil; An, Cheng-Jin; Jin, Ming-Liang; Kang, Sang-Woo; Yun, Ju-Young; Kong, Byung-Seon; et al, JOURNAL OF MATERIALS CHEMISTRY C, v.1, no.21, pp.3414 - 3420, 2013-04

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