CHEMICAL-VAPOR-DEPOSITION; ORGANOSILICON THIN-FILMS; LOW REFRACTIVE-INDEXES; LOW-K; MECHANICAL-PROPERTIES; GLOW-DISCHARGES; SPIN-ON; NANOIMPRINT LITHOGRAPHY; SIOC-H; PRECURSORS
JOURNAL OF MATERIALS CHEMISTRY C, v.1, no.21, pp.3414 - 3420
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