Browse "CBE-Conference Papers(학술회의논문)" by Author Kwon, SK
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| Effect of CO and CO2 addition in CF4/O2 gas system on tungsten etching Kwon, SK; Nam, CW; Woo, Seong-Ihl, 한국화학공학회 추계학술발표회, 한국화학공학회, 1990-10 |
| Effect of CO ans CO2 addition to CF4/O2 gas system on the etch rate and selectivity of W Kwon, SK; Nam, CW; Chung, IJ; Woo, Seong-Ihl, Conference on Semiconductors Materials, Component & CAD, pp.161 -, 1991 |
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