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1
Effect of CO and CO2 addition in CF4/O2 gas system on tungsten etching

Kwon, SK; Nam, CW; Woo, Seong-Ihl, 한국화학공학회 추계학술발표회, 한국화학공학회, 1990-10

2
Effect of CO ans CO2 addition to CF4/O2 gas system on the etch rate and selectivity of W

Kwon, SK; Nam, CW; Chung, IJ; Woo, Seong-Ihl, Conference on Semiconductors Materials, Component & CAD, pp.161 -, 1991

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