Effect of CO and CO2 addition in CF4/O2 gas system on tungsten etching

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Publisher
한국화학공학회
Issue Date
1990-10
Language
ENG
Citation

한국화학공학회 추계학술발표회

URI
http://hdl.handle.net/10203/114989
Appears in Collection
CBE-Conference Papers(학술회의논문)
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