Effects of Wet Ocidation on Composition and Electrical Properties of Sub-10nm Thick Silicon Nitride Films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | E.G.Lee | ko |
| dc.contributor.author | J.S.Roh | ko |
| dc.contributor.author | Lim, Ho Bin | ko |
| dc.date.accessioned | 2013-02-25T02:47:38Z | - |
| dc.date.available | 2013-02-25T02:47:38Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1991 | - |
| dc.identifier.citation | JOURNAL OF THE AMERICAN CERAMIC SOCIETY, v.74, pp.1563 | - |
| dc.identifier.issn | 0002-7820 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/59228 | - |
| dc.language | English | - |
| dc.publisher | Wiley-Blackwell | - |
| dc.title | Effects of Wet Ocidation on Composition and Electrical Properties of Sub-10nm Thick Silicon Nitride Films | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 74 | - |
| dc.citation.beginningpage | 1563 | - |
| dc.citation.publicationname | JOURNAL OF THE AMERICAN CERAMIC SOCIETY | - |
| dc.contributor.localauthor | Lim, Ho Bin | - |
| dc.contributor.nonIdAuthor | E.G.Lee | - |
| dc.contributor.nonIdAuthor | J.S.Roh | - |
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