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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

플라즈마 증착 방법에 의한 수소화된 비정질질화규소 박막의 특성연구

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이창우 / 김서윤 / 배병성 / 이주천
Publisher
한국물리학회
Issue Date
1991-05
Language
Korean
Citation

응용물리, v.4, no.2, pp.217 - 224

ISSN
1013-7009
URI
http://hdl.handle.net/10203/58672
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