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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

플라즈마 화학증착된 텅스텐 질화막의 질소농도 제어에 따른 특성 변화

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이주천
Publisher
한국물리학회
Issue Date
1994-01
Language
Korean
Citation

새물리, v.34, no.1, pp.69 - 75

ISSN
0374-4914
URI
http://hdl.handle.net/10203/58644
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