플라즈마 화학증착된 텅스텐 질화막의 질소농도 제어에 따른 특성 변화
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이주천 | ko |
| dc.date.accessioned | 2013-02-25T01:08:49Z | - |
| dc.date.available | 2013-02-25T01:08:49Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994-01 | - |
| dc.identifier.citation | 새물리, v.34, no.1, pp.69 - 75 | - |
| dc.identifier.issn | 0374-4914 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/58644 | - |
| dc.language | Korean | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | 플라즈마 화학증착된 텅스텐 질화막의 질소농도 제어에 따른 특성 변화 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 34 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 69 | - |
| dc.citation.endingpage | 75 | - |
| dc.citation.publicationname | 새물리 | - |
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