Effects of Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon
- Publisher
- Elsevier Science Sa
- Issue Date
- 1990
- Language
- English
- Citation
SURFACE & COATINGS TECHNOLOGY, v.43, pp.986
- ISSN
- 0257-8972
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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