A study on the characteristics of aluminum oxide thin films prepared by ECR PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이원종 | ko |
| dc.date.accessioned | 2013-02-24T14:42:55Z | - |
| dc.date.available | 2013-02-24T14:42:55Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994-04 | - |
| dc.identifier.citation | 한국세라믹학회지, v.31, no.6, pp.601 - 608 | - |
| dc.identifier.issn | 1229-7801 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/57950 | - |
| dc.language | Korean | - |
| dc.publisher | 한국세라믹학회 | - |
| dc.title | A study on the characteristics of aluminum oxide thin films prepared by ECR PECVD | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 31 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 601 | - |
| dc.citation.endingpage | 608 | - |
| dc.citation.publicationname | 한국세라믹학회지 | - |
| dc.contributor.localauthor | 이원종 | - |
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.