The Effect of Reactant Gases Composition on The PECVD of TiN
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chun , Soung Soon | ko |
| dc.date.accessioned | 2013-02-24T12:13:11Z | - |
| dc.date.available | 2013-02-24T12:13:11Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989 | - |
| dc.identifier.citation | THIN SOLID FILMS, v.169, no.1, pp.57 - 68 | - |
| dc.identifier.issn | 0040-6090 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/57045 | - |
| dc.language | English | - |
| dc.publisher | Elsevier Science Sa | - |
| dc.title | The Effect of Reactant Gases Composition on The PECVD of TiN | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1989T532500007 | - |
| dc.identifier.scopusid | 2-s2.0-0024608452 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 169 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 57 | - |
| dc.citation.endingpage | 68 | - |
| dc.citation.publicationname | THIN SOLID FILMS | - |
| dc.contributor.localauthor | Chun , Soung Soon | - |
| dc.type.journalArticle | Article | - |
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