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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

A NUMERICAL-SIMULATION OF RF GLOW-DISCHARGE CONTAINING AN ELECTRONEGATIVE GAS-COMPOSITION

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OH, YH / CHOI, NH / Choi, Duk In
Publisher
AMER INST PHYSICS
Issue Date
1990-04
Language
English
Article Type
Article
Citation

JOURNAL OF APPLIED PHYSICS, v.67, no.7, pp.3264 - 3268

ISSN
0021-8979
DOI
10.1063/1.345360
URI
http://hdl.handle.net/10203/56659
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